Chen Di, male, 196 1 born, 1978 admitted to China University of Science and Technology, 1980 sent by the state to study in Germany. 1986 and 1990 received their master's and doctor's degrees in chemistry from the University of Hamburg, Germany, respectively. 1990- 1992 is engaged in postdoctoral research on MEMS micromachining technology in MicroParts, Germany. 1993 Up to now, associate professor, professor and doctoral supervisor of Shanghai Jiaotong University, and currently vice president of the Institute of Micro-nano Science and Technology of Shanghai Jiaotong University. He has presided over and undertaken more than 40 scientific research projects, including the Science and Technology Commission for National Defense, the National Natural Science Foundation, the Ministry of Science and Technology, the Ministry of Education, the Shanghai Science and Technology Commission, the Education Commission, Siemens of Germany, and 3M of the United States. A new X-ray mask preparation process and a new non-silicon three-dimensional micromachining technology-DEM technology have been developed, and various microfluidic chips, implantable bio-microelectrode arrays, MEMS integrated probe cards, microwave directional antennas and MEMS inertial switches have been developed by using MEMS technology, which have been applied to biomedicine, information industry and national defense. Published more than 20 papers/kloc-0, of which more than 70 were included by SCI and EI, and the papers were cited more than 270 times. He applied for 29 invention patents, including 16, participated in writing 4 monographs, and presided over the publication of the translation of Introduction to Microfabrication 1 article. "Non-silicon MEMS technology and its application" won the first prize of Shanghai Technological Invention in 2007 and the second prize of National Technological Invention in 2008. "Structure, Fabrication, Modification and Application of Microfluidic Biochip" won the second prize of natural science in 2008. At present, its research fields are non-silicon MEMS micromachining technology, implantable biological microsystem, microfluidic chip and RF-MEMS. Professor Chen Di is the executive director of Micro-Nano Devices and Systems Technology Branch of China Instrumentation Society, a member of National Micro-Electro-Mechanical Technology Standardization Technical Committee, and the editorial board of Micro-Nano Electronic Technology, Nanotechnology and Precision Engineering, Micro-Machining Technology and Functional Materials and Devices Journal.