Abstract: Micro-robot is an important branch of MEMS, because it can enter a narrow macro space like human and robot.
Management has been widely concerned in recent decades. Firstly, this paper analyzes several kinds of micro-robots that have appeared at home and abroad in recent years.
Based on its basic characteristics and performance, some key problems encountered in the current research of micro-robots are discussed, and the future of these fields is pointed out
The main research and development direction in a period of time.
Keywords: micro robot; Micro-actuator
In recent years, using MEMS technology, micro-satellite, micro-flight.
And enter the narrow space to show the attractive micro-robot application before.
The strategic significance of dual use of king and king. Therefore, as a MEMS technology
Technology based on the development direction of precision micromachining robot technology
Research has become a hot spot, and the research in this area not only includes
Strong market drive, but a large number of research institutions. hitherto
Many countries represented by this have done a lot of research in this field, focusing on
Is to develop into a small space micro-robot for industry and enter the small space of human body.
Medical Microsystems and Micro-factories. Within the National Natural Science Foundation
Under the auspices of the 863 high-tech research and development plan, Tsinghua University has grown.
Shanghai Jiaotong University, Harbin Institute of Technology, Guangdong Industry.
Research, Shanghai University and other research institutes are micro-robots and micro-operations departments.
The EC conducted extensive research and independently developed a prototype. At present this country
The research of micro-robot mainly focuses on three areas [6]: (1)
Micro-pipeline detector for gas, chemical and power generation equipment
People. (2) For the human body, it is a micro-machine for non-invasive treatment that enters the intestine.
People. (3) Non-disassembly inspection of micromechanics of complex mechanical systems
People.
1 Development and Research of Micro Robot
According to the actual situation of micro-robot research, we
Micro-pipeline robot, non-invasive medical micro-robot and
Special micromanipulator.
1 1 1 micro-pipeline robot
The micro pipeline robot is based on the narrow space within the above application range.
Its environmental feature is that it enters the channel or gap line in a small pipeline.
Line detection, repair and other operations. Because the traditional electron tube works under the central condition
Conventional pipeline machines with obviously different habitats, operating methods and structural principles.
The equipment also varies from person to person, so the pipeline robot is used according to the conventional technology.
Scale is not feasible. In view of this, the micro-pipe robot
We should open up a new road to go. In recent years, with the development of MEMS technology
Development of Giant Magnetostrictive Materials and Its Crystal Piezoelectric Effect and Magnetic Plane Coupling
The development of technology application makes the appearance and application of new micro-drivers possible.
Reality. The research results of micro-drive have become the second step of micro-pipeline robot.
Develop basic [1].
Nagoya University in Japan has developed a robot that can make micro-pipes.
It is used for the detection of small pipes and small spaces in the biomedical field.
Small job. This robot can lay pipes outside the electromagnetic coil drive.
It can be moved without supplying cables. Tokyo institute of technology and NEC
The company cooperated in the research of spiral tube mobile micro robot with a diameter of.
The maximum moving speed of φ25 14mm straight pipe is 260mm/s, which is the most
The large traction force is 12N. Anthony French and others developed
Φ16mm inchworm robot, the largest of such micro-robots.
The movement speed is 5mm/s, the load is as high as 20N, and it has high mobility.
Accuracy and load, but the speed is slow and the movement is complicated.
Domestic Shanghai University and Shanghai Jiaotong University have developed inertia.
Impact tube micro-robot, a micro-robot used by Shanghai Jiaotong University.
Driven by stacked piezoelectric actuators; Shanghai Micro Robot Drive University
And there are two types of stacked bimorph films [3]. As shown in figure 1
Motion mechanism of electric thin-film micro-pipe robot, double robot
In contrast to a single piezoelectric film, the piezoelectric film drive increases the drive.
Edge, improve the bearing capacity. The maximum moving speed of this mechanism is up to.
To 15mm/s, with forward and backward, ascending and descending functions.
Interviewee: Anonymous 3- 14 20:27
Development and research status of micro-robot
Micro-robot is an important branch of micro-electro-mechanical system, because it can enter the narrow space that human beings and macro-robots can't compare.
In homework, several of them have received extensive attention in recent ten years. In this paper, firstly, some micro-robots that have appeared at home and abroad in recent years are given, and they are analyzed.
Several key problems encountered in the research of micro-robots at present are discussed, and the future of these fields is pointed out on the basis of their characteristics and functions.
The main research and development direction in a period of time.
Keywords: micro robot; Micro actuator
In recent years, micro-satellites, micro-aircraft using MEMS technology.
Machines and micro-robots entering narrow spaces show a fascinating application prospect.
Concept and the application of the two strategic meanings of the army and the people. Therefore, as a micro-electric & mechanical system skill,
One of the development directions of micro-robot technology based on precision machining
Research has become one of the hot spots in the world, and the research in this area not only includes
Strong market driving force, and the participation of many thinking factors. day
Many countries and places represented by Ben have carried out a lot of research in this regard.
It is to develop micro-robots that enter narrow industrial spaces and narrow human spaces.
Micro medical system and micro factory. China is in the national natural science discipline.
Gold, 863 high-tech research and development plan, etc. With the help of money, there is a big Jinhua
Shanghai Jiaotong University, Harbin Institute of Technology, Guangdong University of Technology.
Science, Shanghai University, etc. Research on micro-robots and micro-surgery aimed at hospitals
Generally, a lot of research has been done, and the principle prototypes have been developed respectively. Current country
The micro-robots studied in it mainly focus on three areas [6]: (1)
Micro-machinery for small pipes of gas, chemical and power generation equipment
People. (2) Create a micro-machine for diagnosis and treatment according to the way the human body enters the intestine.
People. (3) Micro-machinery for complex mechanical systems without disassembly and inspection.
People.
Development and research status of a micro-robot
According to the actual situation of micro-robot research in China, we
The micro-pipeline robot and non-invasive micro-medical robot are discussed emphatically.
Micro robot for special operation.
1 1 1 micro pipeline robot
The application background of micro pipeline robot is lifting in a narrow space.
Yes, its environmental characteristics are running in narrow small tubular channels or blind ends.
Go for inspection, maintenance, etc. Homework. Because of the care in the working ring under normal conditions
Beijing is obviously different, and its operation mode and structural principle are similar to those of conventional pipe-making machines.
Robots are different, so they are pressed onto pipeline robots according to conventional technical means.
A comparative contract is not feasible. In view of this, the micro pipeline robot
Running away is in response to opening up another Xi road. With the development of micro-electro-mechanical technology in recent years
Using the development of super piezoelectric crystal and the matching of piezoelectric effect with flexible materials
The development of application technology makes it possible for the emergence and application of new micro-drivers.
Reality. The research results of micro-actuator have become the top priority of micro-pipeline robot.
Want to develop the foundation [1].
Nagoya University in Japan has developed a miniature pipeline robot that can
Used to check small pipes to make small spaces in the biomedical field.
Small job. This kind of robot can get rid of it by electromagnetic coil outside the pipeline.
Move, but don't use cable power supply. Japan University of Technology and NEC in Tokyo
The spiral micro-robot with a diameter of.
Φ 2514mms keeps the maximum moving speed in the tube at 260 mms/ s, which is the most
The big lead is 12 Ns. Anthierens, France, is waiting for someone to apply for development.
Φ16mms peristalsis robot, which is the largest micro-robot.
The movement speed is 5 mms/ s, the load can reach 20 Ns, and it has high mobility.
Accuracy, heavy load, but slow movement speed and complex structure.
Both Shanghai Local University and Shanghai Jiaotong University have developed inertia.
Impact pipeline micro-robot, adopted by Shanghai Jiaotong University micro-robot.
Layer piezoelectric actuator drive; Micro-robot driver of Shanghai University
Layered and double-pressed electric films 2[3]. Figure 1 shows double press.
The motion mechanism of the electric shock film small pipeline robot adopts double
Press an electro-thin film actuator to amplify and drive an electro-thin film on the list.
Force to improve load capacity. The maximum moving speed of that mechanism can be achieved.
To 15 mms/ s, with forward, backward, upward and downward functions.