MEMS acceleration sensor is a micro-electromechanical system (MEMS), which consists of a movable cantilever beam, an electrostatic container and a fixed base. The capacitance on the cantilever beam will shift due to external acceleration, thus changing the charge distribution in the capacitance. The capacitor placed on the base will not be affected by external acceleration, so the charge distribution in the capacitor remains unchanged.

When the cantilever beam is subjected to external acceleration, the charge distribution in the capacitor will change, which will lead to the change of the charge in the capacitor and the voltage difference. The voltage difference is proportional to the external acceleration, so the external acceleration can be calculated by measuring the voltage difference.

Capacitive MEMS acceleration sensor has the advantages of low manufacturing cost, and the sensitivity of the sensor can be adjusted by changing the capacitance. Disadvantages are low accuracy and easy to be affected by temperature.