Steady-state miniature multi-beam accelerator light source

Light source of steady-state micro poly beam accelerator

Tang Chuanxiang, Deng

Journal of Physics, 2022,71(15):15295438+0.

doi: 10.7498/APS . 764876867

Article introduction

Accelerator light source is one of the most advanced tools to explore the structure and dynamic characteristics of matter. Up to now, there are two main types of accelerator light sources-synchrotron radiation source based on electron storage ring and free electron laser based on electron linear accelerator, which can provide wide-spectrum radiation with high repetition rate and coherent light with high peak power respectively. Steady-state microbeam (SSMB) is a new accelerator light source, which organically combines the characteristics of two kinds of light sources, and can provide radiation with high average power, high repetition rate, narrow bandwidth and wavelength covering from terahertz to soft X-ray band, and has great scientific and industrial application prospects. For example, SSMB light source can achieve luminous flux about three orders of magnitude higher than the existing synchrotron radiation light source, which provides a brand-new tool for the study of angle-resolved photoelectron spectroscopy with ultra-high energy resolution, and strongly promotes the research of frontier scientific issues such as the structure and function of quantum materials, energy and substance conversion at atomic scale, etc. At the same time, SSMB light source has the potential to provide kilowatt-class short-wavelength radiation, which can not only break through the power limit of existing extreme ultraviolet lithography machines, but also be extended to shorter wavelengths, and become the mainstream light source of the next generation of Blue-X lithography technology with a wavelength of about 6 nm. Compared with the traditional storage ring, the electron beam length of SSMB storage ring is shortened by about 6 orders of magnitude, which will definitely bring the research of accelerator physics to a new height.

Tsinghua University SSMB research team was established on 20 17, and it is in an international leading position in SSMB research. After five years of hard work, the team has made a series of important progress in SSMB research. Based on the brief introduction of the existing accelerator light sources-synchrotron radiation light source and free electron laser, the concept of SSMB, the experimental progress of principle verification, the core physics and key technical challenges, the SSMB-EUV light source scheme of Tsinghua and its potential revolutionary influence on scientific research and chip lithography are briefly discussed. This review paper is a summary of the research results of SSMB research team in recent years, hoping to provide some clues and help for domestic readers to further understand this new accelerator light source.

Figure 1 Comparison between traditional storage ring (a) and SSMB storage ring (b)

Brief introduction of the author

Professor Tang Chuanxiang from Tsinghua University

1992 graduated from the physics department of Tsinghua University with a bachelor of science degree, and obtained a bachelor of engineering degree (second degree) from the department of electronic engineering of Tsinghua University; 1996 department of engineering physics, Tsinghua University, received a doctor's degree in engineering. 2006-2065 438+02 Dean of department of engineering physics, Tsinghua University. At present, he is the executive director of China Nuclear Society, the vice chairman of particle accelerator branch, the vice chairman of radiation physics branch, the deputy director of the teaching steering committee of nuclear engineering and nuclear technology specialty in colleges and universities of the Ministry of Education, the secretary general of the evaluation group of nuclear science and technology of the State Council Academic Degrees Committee, and the chairman of advanced new accelerator group (ANA) of International Future Accelerator Committee (ICFA).

Mainly engaged in the research and teaching of particle accelerator physics and application. The main research directions include small electron linear accelerator and its application, inverse compton scattering X/γ light source, low emittance photocathode microwave electron gun, steady micro multi-beam new concept accelerator light source, etc. Relevant scientific research achievements have won the first prize of National Science and Technology Progress Award, National Science and Technology Progress (Innovation Team) Award, Second Prize of National Natural Science Award, First Prize of Beijing Science and Technology Progress Award, China Patent Gold Award, etc. Individuals have won the National Outstanding Youth Fund, outstanding teachers in Beijing, model of educational innovation in Beijing, and talents of the Ministry of Education in the new century.