1. Convert the copied data into TXT format: after importing the data of the required fitting elements into Origin, copy the values of columns A and B into an empty notepad document (i.e. two-column format, with binding energy on the left and peak on the right) and save it. If you want to remove the pulse data or intercept some data, you need to do it at Origin.
2. Open the XPS peak and import data: click Data-Import (ASCII) to import the stored data, and the corresponding XPS spectrogram will appear.
3. Select the background: click the background. Because of software problems, it's best not to change the position of high BE and low BE, otherwise we can't go back to the original point. At this time, the background will connect these two points. The type can be selected according to the actual situation, and Shirley type is generally selected.
4. Add peak: a small box appears at the point of adding peak. Choose peak types such as S, P, D and F at the peak type (generally choose S). When the required peak position needs to be fixed at this position, the small box in front of the fixed point, such as FWHM and peak area, can also be selected in the same way.
Constraints in each project can be used to determine the relationship between this peak and another peak. For example, the peak spacing of Pt4f7/2 and Pt4f5/2 can be fixed at 45 and the peak area ratio can be fixed at 4:3. Click Delete Peak to delete the peak. Then click Add Peak to select the second peak, and so on.
5. Fitting: After selecting the number of peaks to be fitted and approximate parameters, click the best area for fitting, and observe the coincidence degree between the fitted total peak and the original peak. If it's not good, click on the optimal area many times.
6. View parameters: After fitting, click 0, 1, 2, etc. View the parameters of each peak under "Regional Peaks" in another window. At this time, the XPS peak that turns red is the selected peak. If you are not satisfied with the fitting results of the region, you can change the parameters of these peaks and click Optimize.
7. Click Save XPS to save the picture. Next time you want to open Open XPS, you can open this picture to continue processing.
8. Data output: point data-printing with peak parameters can print out the spectrogram of each peak parameter, and the content ratio of the chemical state of the element at different peak positions can be calculated through the peak area.
Click Data-Export to Clipboard, and charts and data will be copied to the clipboard. Open a document (such as a Word document) and click Paste to paste the chart and data.
Click on the data-export (spectrum) to save the fitted data, then open it from the multi-column data column in Origin to get the multi-column data, and make a fitting diagram in Origin.
Significance of xps peak splitting.
In the XPS manual, there are charts of the peak position and chemical bond structure of each element. According to this icon, you can process the measured data, such as the silicon nitride you made, but there is a small amount of silicon oxide in it, so your Si2p peak position is neither standard silicon nitride nor standard silicon oxide. This requires you to use software such as origin or xpspeakfit to peak the obtained Si2p peak.
That is to say, two or more Gaussian peaks are used to fit the obtained test curve, and according to the area of each Gaussian peak, how many Si elements combine with O to form Si-O bonds and how many combine with N to form Si-N bonds.