Professor Yuan was born in 196 1, professor of Northwestern Polytechnical University, doctoral supervisor, dean of the School of Mechanical and Electrical Engineering, distinguished professor, and "Changjiang Scholar" of the Ministry of Education. He is also the executive director of China Micro/Nano Technology Society, the vice chairman of Micro/Nano Devices and Systems Technology Branch of China Instrumentation Society, the director of China Mechanical Engineering Society, the member of Micro/Nano Manufacturing Technology Branch, the member of Production Engineering Branch, and the editorial board of academic journals such as Journal of Mechanical Engineering and Journal of Sensing Technology and Nanotechnology. Mainly engaged in MEMS research.
He founded the national defense key discipline of MEMS and nanotechnology and the key laboratory of micro/nano system in Shaanxi Province. Won 3 second prizes and 5 third prizes for provincial and ministerial scientific and technological progress. Published the first monograph on MEMS and related technologies in China, and was rated as a recommended textbook for graduate students of the Ministry of Education. Under the leadership of an academic team composed of young teachers, he has taken the lead in carrying out cutting-edge research work in China, such as MEMS integrated design, smart skin based on MEMS, excimer laser micromachining technology of micromechanical structure, and formed research characteristics in micro-energy, micro-inertial devices, micro-optical systems and so on.
Chinese name: Yuan
Nationality: People's Republic of China (PRC).
Date of birth: 196 1 year
Occupation: teacher
Graduate school: Northwestern Polytechnical University
Main Achievements: distinguished professor, Changjiang Scholar of the Ministry of Education.
Masterpiece: micromachining and micromachining technology.
Gender: male
Character experience
1986 obtained a master's degree in engineering from Northwestern Polytechnical University;
1992- 1993 studied at the French National Institute of Micro Technology;
1996 received a doctorate;
65438-0998 Professor of Northwestern Polytechnical University and visiting scholar of City University of Hong Kong in the same year;
65438-0999 Doctoral supervisor of mechanical engineering, instrument science and technology in Northwestern Polytechnical University.
In 2002, he was a senior visiting scholar in NRC, Canada;
In March 2007, Professor Yuan was hired as "Changjiang Scholar distinguished professor".
Professor Yuan is also a director of China Micro-Nano Technology Society, a member of Micro-Nano Manufacturing Technology Branch of China Mechanical Engineering Society, and a vice chairman of Micro-Nano Devices and Systems Technology Branch of China Instrumentation Society.
Elected academician
Yuan is an effective candidate to be co-opted as an academician in the Department of Mechanical and Transportation Engineering of China Academy of Engineering on July 20th.
Yuan is an effective candidate for the 20 19 China Academy of Engineering's Department of Mechanical and Transportation Engineering.
school achievement
Professor Yuan began to study micro-electro-mechanical systems (MEMS) during his study in France in the early 1990s. After returning to China, he founded the discipline of "MEMS and Nanotechnology", which was rated as the key discipline of national defense and the doctoral program of two disciplines, and was independently established by the mechanical engineering major. With the support of the "985 Project", Shaanxi Provincial Key Laboratory of Micro/Nano System of Northwestern Polytechnical University was established, which is internationally advanced and domestically first-class. With the development of 10 years, the laboratory has completed the construction investment of140,000 yuan, established a MEMS integrated manufacturing platform that can realize three-layer polysilicon surface processing, bulk processing combined with wet processing and thick glue lithography quasi-LIGA processing, and formed a MEMS integrated design unit, a silicon-based material micromachining unit and a micro/nano detection unit, which is second to none in the western region.
The laboratory has gathered a group of international academic leaders, a group of young academic leaders and academic backbones with innovative ability and development potential, and formed a scientific research team with reasonable professional hierarchy and high overall innovative ability. In recent years, * * * has undertaken 30 research projects such as National Natural Science Foundation, 863/MEMS major projects and national defense basic research projects, and won 8 provincial and ministerial-level scientific and technological progress awards; Published more than 100 research papers, 52 of which were included by SCI and EI and cited 149 times; He compiled and published a monograph "Micromachining and Micro-machining Technology", which systematically and comprehensively discussed MEMS and related technologies in China.
In the research of MEMS, he led a group of young and middle-aged teachers to form an excellent academic team, and took the lead in carrying out cutting-edge research work in China, such as MEMS integrated design, smart skin based on MEMS, excimer laser micromachining technology of micro-mechanical structure, micro-adaptive optical system based on MEMS, and formed research characteristics in micro-energy and micro-inertial devices, and established a domestic MEMS integrated design platform. After identification, it has reached the international advanced level, and reached the international leading level in the modeling of air damping behavior under the micro-scale condition of system-level model function. Some research results have been applied to national defense model projects and won two second prizes in national defense science and technology.
Main research direction
1. Integrated Design and Manufacture of Micro Electro Mechanical Systems (MEMS)
2. Smart skin
3. Micro energy
4. Micro inertial devices and systems
5. Micro-optical devices and systems
6. Nanocomposite bionic structure
Winning record
1. won 3 second prizes for national technological inventions, 3 first prizes for provincial and ministerial science and technology, 5 second prizes and 5 third prizes;
2. distinguished professor of the Ministry of Education and "Changjiang Scholar";
3. He is also the executive director of China Micro/Nano Technology Society, the vice chairman of Micro/Nano Device and System Technology Branch of China Instrumentation Society, the director of China Mechanical Engineering Society, the member of Micro/Nano Manufacturing Technology Branch, and the member of Production Engineering Branch. And editorial boards of academic journals such as Journal of Mechanical Engineering and Journal of Sensing Technology and Nanotechnology;
4.4 Reviewer of internationally renowned academic journals. SensorandActuatorA and Sensor
5. He used to be a member of the technical planning committee of famous international conferences such as IEEENEMS, ASMENanoandMicroSystem, APCOT, the chairman of ICMAN conference of international conferences, and the chairman of IMCC and other branches;
6. The project "Manufacturing Technology and Application of Aerospace MEMS" presided by Professor Yuan won the second prize of 20 19 National Technological Invention.
7. In May 2020, he won the first prize of the second National Innovation Award.