In order to solve the problems of poor system temperature stability, low reliability and difficult processing in general optical voltage sensor (OVT), a voltage sensor based on electrostatic diaphragm is proposed. Its working principle is to drive the diaphragm to vibrate by changing the interaction between electric field and static electricity. In this paper, three modes: single-ended driving voltage type electrostatic diaphragm sensor, double-sided driving voltage type electrostatic diaphragm sensor and nonpolar voltage type electrostatic diaphragm voltage sensor are also analyzed theoretically. The simulation results show that the diaphragm electrostatic voltage sensor can measure quickly and accurately when the diaphragm mass m is much less than the diaphragm mechanical resistance R K.