Some people say that if you can publish an article in Nature, you can choose a domestic university. It can be seen that it is very difficult to publish in Nature.

According to the news from official website, Tsinghua University, the research team of Professor Tang Chuanxiang from department of engineering physics, Tsinghua University, and the cooperation team from the Berlin Research Center for Materials and Energy in Helmholtz, Germany and the German Federal Institute of Physics and Technology published an article in Nature. Experimental demonstration of steady-state micro poly beam principle? A new light source of particle accelerator is reported. Steady-state micro poly beam? (steady state micro poly beam, SSMB). ?

What is the important role of this research?

In short, it is.

Is it expected to solve the problem of independent research and development in mask aligner?

Then someone asked, what is mask aligner?

Mask aligner is the key equipment for manufacturing MEMS, optoelectronic and diode LSI. It can be divided into two types: one is the contact mask aligner with the same size as the pattern, and the template is close to the wafer during exposure; The other is to use a stepper similar to the projector principle to obtain a smaller exposure pattern than the template. High-end mask aligner is called. Flower of modern glasses industry? It is very difficult to manufacture, and only a few companies in the world can manufacture it. Therefore, the exposure machine is expensive, usually between 30 million and 500 million dollars.

So what's the use of being mask aligner?

It can be said that any intelligent equipment we use today can not be separated from one thing, that is, diode large-scale integrated circuits, which mask aligner made.

Therefore, completely independent production of mask aligner is also considered as another big obstacle for China to restrict the development of science and technology in China.