1987 graduated from the Department of Electric Power and Automation of Tianjin University. 1In March, 1993, he obtained his master's degree from the Graduate School of China Academy of Sciences. 1April, 1993 to1August, 1996, he served as assistant researcher and deputy head of permanent magnet research group of Institute of Electrotechnics, Chinese Academy of Sciences. 1From September 1996 to 2002, he studied in the Department of Electrical and Computer Engineering, University of Wisconsin-Madison, USA, majoring in microelectronics and solid state, and obtained his doctorate. From June 2002 to August 2005, he worked as a postdoctoral researcher in the School of Electrical and Computer Science of Cornell University. In September 2005, he was appointed as an associate professor of Sabendong MEMS Research Center of Xiamen University, and was promoted to professor in July 2008. Research interests include MEMS, micro-nano electronic technology and applied electronic technology, involving implantable medical micro-devices, ultrasonic technology, microsurgical instruments, micro-energy technology, biochip technology, sensor manufacturing and measurement control technology, radio-frequency electronic technology, biomedical devices and equipment, etc. At present, he has presided over and undertaken many research projects such as the National 863 Plan, the National Natural Science Foundation, the Fujian Provincial Natural Science Foundation, and major scientific and technological projects.