A. Research tools
Since the advent of 1975 imitation lithography technology, manufacturing model (not sure whether the modeling here should be translated in this way) has become a powerful tool for studying lithography. The following are several manufacturing models that are helpful to the previous research.
Manufacturing models have been used to advocate the use of dyed photoresists to reduce standing waves. . After the phase shift mask appeared (I don't know this). Since then, all major stepper suppliers have begun to provide variable digital aperture and variable system with partial isotropy. Manufacturing mode is the best tool to improve these flexible mechanical devices. So far, the use of pupil filter to enhance the performance of lithography only appears in theory, accompanied by the use of lithography manufacturing mode. [9] If similar research can be used to prove the usefulness of pupil filters, then an experimental investigation will be held.