Chinese translation
Bulk micromachining
Bulk: n. 1 Volume, volume, size. 2. huge; A monster; Large chunks; ...
Examples and usage
1. This paper introduces the volume micromachining technology, focusing on the fabrication process of this optical switch.
On the basis of expounding the commonly used micromachining technology, this paper focuses on the fabrication technology of this micromechanical optical switch.
2. Compared with surface micromachining technology, the capacitive accelerometer manufactured by bulk micromachining technology has large sensitive mass, low noise and high resolution.
Surface MEMS capacitive sensor has the advantages of small sensitive mass, large thermo-mechanical noise and high resolution.
3.。 5. Samples with characteristic impedances of 120 and 50 were prepared by surface micromachining and bulk micromachining, respectively. Stress relaxation has been carefully considered through design and manufacture to obtain a structure with the lowest stress.
The V-groove mems*** planar waveguide was fabricated by hybrid etching process, in which the transmission line with characteristic impedance of 50 was realized by bulk silicon processing technology and the transmission line with characteristic impedance of 120 was realized by surface micromachining technology.
4. Aiming at silicon micromachined tuning fork vibrating gyroscope, the matrix perturbation technique in stochastic finite element method is introduced, and the statistical characteristics of natural frequency and output capacitance of tuning fork vibrating gyroscope are analyzed.
Based on the random perturbation technique, the statistical characteristics of natural frequency change and detection output capacitance change of tuning fork vibrating MEMS gyroscope are calculated quantitatively, and the influence of random error of material size brought by batch processing of MEMS gyroscope on its performance is expressed by the idea of probability.
5. This paper is a part of the project "Design and Research of Micro Inertial Measurement Unit" of University of Electronic Science and Technology of China. Through the research of MEMS and MEMS acceleration sensor, this topic will complete a series of micro-inertial measurement combined systems, which are applied to rocket and missile guidance systems. This paper mainly includes the following aspects: (1) Studying the mature mems processing technology at present, and developing a capacitive acceleration sensor with simple structure based on a new silicon micromachining process.
This thesis comes from the project "Design and Research of mems Inertial Combination" of School of Mechanical and Electronic Engineering, University of Electronic Science and Technology of China. This topic hopes to develop and design a series of mimu systems that can be used for rocket and missile guidance through the research of mems technology and mems inertial sensors. The main work is as follows: The mature mems machining technology is studied, and a simple capacitive acceleration sensor based on anisotropic silicon micromachining technology is proposed.
6. The fabrication process of micro-clamp based on silicon micromachining is designed. The footing effect, hysteresis effect and bonding failure in icp are discussed emphatically. The cantilever clamping finger with 6 m width and equivalent length of 547 1 m was successfully released. The characteristics of electrostatic micro-gripper driven by comb teeth are tested.
A large number of process tests and analysis have been carried out, especially the long cantilever clamping arm with large depth-to-width ratio and comb drive structure, and the key technologies in micro-machining technology have been solved.